Advanced Energy Industries, a renowned global leader in precision power conversion, measurement, and control solutions, has introduced its latest innovation, the Luxtron FluorOptic Thermometry (FOT) family. This highly integrated converter platform sets a new industry standard by providing high-accuracy sensing capabilities across an ultra-wide temperature range.
The newly launched Luxtron M-1100 is designed specifically for plasma-enhanced semiconductor deposition and etch fabrication processes. It exhibits exceptional performance, operating seamlessly from -200°C, within the cryogenic range, to scorching “hot chuck” temperatures of 450°C. What sets the Luxtron M-1100 apart is its industry-leading accuracy of +/- 0.1°C and impressive stability of +/- 0.05 °C. These characteristics make it ideal for applications that demand precise and reliable temperature monitoring.
Featuring five integrated channels, the Luxtron M-1100 enables simultaneous monitoring of multiple probes, significantly enhancing efficiency and flexibility. Moreover, the platform’s communication outputs are designed to simplify digital monitoring, updates, and seamless integration into existing system architectures.
Dhaval Dhayatkar, the Vice President and General Manager of Critical Sensing and Control Products at Advanced Energy, emphasized the significance of accurate monitoring in meeting the evolving requirements of semiconductor manufacturers. He stated, “Accurate monitoring across extended temperature ranges is critical as semiconductor manufacturers look to meet the complex etch and deposition requirements of next-generation fabrication processes.” Dhayatkar also highlighted that the Luxtron M-1100 strengthens Advanced Energy’s leadership position in high-accuracy, phosphor-based fiber-optic thermometry.
The Luxtron FOT sensing systems leverage advanced fiber optic probes equipped with phosphor sensor technology. These systems combine cutting-edge converters with an advanced light source, proprietary software algorithms, and low-noise amplification circuitry. Notably, the Luxtron M-1100 is the first model in the Luxtron FOT family to offer both analog and EtherCAT communication interfaces, expanding compatibility options for users.
The Luxtron M-1100 converter is designed with ease of implementation in mind. Its wall-mounting capability allows for convenient installation on the side of the monitored system, streamlining the integration process. Advanced Energy’s global engineering teams are also readily available to provide support and collaborate with original equipment manufacturers (OEMs) to develop customized probes for state-of-the-art applications.
With the launch of the Luxtron M-1100, Advanced Energy is once again demonstrating its commitment to delivering innovative and reliable solutions that address the complex needs of various industries. By providing high-accuracy temperature sensing capabilities across an ultra-wide temperature range, the Luxtron M-1100 promises to revolutionize temperature monitoring and control systems in plasma-enhanced semiconductor deposition and etch fabrication processes.
